$CM_FORMAT JEOL/EO
$CM_VERSION 1.0
$CM_COMMENT KOPRI
$CM_DATE 2018-10-22
$CM_TIME 09:20:05
$CM_OPERATOR General
$CM_INSTRUMENT JSM-6610
$CM_ACCEL_VOLT 15
$CM_MAG 900
$CM_SIGNAL BEC
$CM_STAGE_POS -2.095 0.922 20.467 0.000 0.000
$CM_STAGE_X -2.095
$CM_STAGE_Y 0.922
$CM_STAGE_T 0.000
$CM_STAGE_Z 20.467
$CM_STAGE_R 0.000
$$SM_MICRON_MARKER 20ƒÊm
$$SM_FILM_NUMBER 0081
$$SM_TITLE PC-SEM M600
$$SM_WD 13
$$SM_SPOT_SIZE 60
$$SM_VACUUM 
$$SM_PHOTO ON
$$SM_MERGE ON
$$SM_SIGNAL1 
$$SM_SIGNAL2 
$$SM_MULTI 
$$SM_VAC_MODE HV