$CM_FORMAT JEOL/EO $CM_VERSION 1.0 $CM_COMMENT KOPRI $CM_DATE 2018-10-22 $CM_TIME 09:12:21 $CM_OPERATOR General $CM_INSTRUMENT JSM-6610 $CM_ACCEL_VOLT 15 $CM_MAG 1000 $CM_SIGNAL BEC $CM_STAGE_POS -1.422 0.538 20.467 0.000 0.000 $CM_STAGE_X -1.422 $CM_STAGE_Y 0.538 $CM_STAGE_T 0.000 $CM_STAGE_Z 20.467 $CM_STAGE_R 0.000 $$SM_MICRON_MARKER 10ƒÊm $$SM_FILM_NUMBER 0078 $$SM_TITLE PC-SEM M600 $$SM_WD 13 $$SM_SPOT_SIZE 60 $$SM_VACUUM $$SM_PHOTO ON $$SM_MERGE ON $$SM_SIGNAL1 $$SM_SIGNAL2 $$SM_MULTI $$SM_VAC_MODE HV