$CM_FORMAT JEOL/EO
$CM_VERSION 1.0
$CM_COMMENT KOPRI
$CM_DATE 2018-10-22
$CM_TIME 13:29:28
$CM_OPERATOR General
$CM_INSTRUMENT JSM-6610
$CM_ACCEL_VOLT 15
$CM_MAG 2000
$CM_SIGNAL BEC
$CM_STAGE_POS 1.723 -2.365 20.465 0.000 0.000
$CM_STAGE_X 1.723
$CM_STAGE_Y -2.365
$CM_STAGE_T 0.000
$CM_STAGE_Z 20.465
$CM_STAGE_R 0.000
$$SM_MICRON_MARKER 10ƒÊm
$$SM_FILM_NUMBER 0135
$$SM_TITLE PC-SEM M600
$$SM_WD 13
$$SM_SPOT_SIZE 60
$$SM_VACUUM 
$$SM_PHOTO ON
$$SM_MERGE ON
$$SM_SIGNAL1 
$$SM_SIGNAL2 
$$SM_MULTI 
$$SM_VAC_MODE HV