$CM_FORMAT JEOL/EO
$CM_VERSION 1.0
$CM_COMMENT KOPRI
$CM_DATE 2018-10-10
$CM_TIME 10:50:25
$CM_OPERATOR General
$CM_INSTRUMENT JSM-6610
$CM_ACCEL_VOLT 15
$CM_MAG 130
$CM_SIGNAL BEC
$CM_STAGE_POS 0.892 16.680 26.110 0.000 0.000
$CM_STAGE_X 0.892
$CM_STAGE_Y 16.680
$CM_STAGE_T 0.000
$CM_STAGE_Z 26.110
$CM_STAGE_R 0.000
$$SM_MICRON_MARKER 100ƒÊm
$$SM_FILM_NUMBER 0006
$$SM_TITLE PC-SEM M600
$$SM_WD 10
$$SM_SPOT_SIZE 60
$$SM_VACUUM 
$$SM_PHOTO ON
$$SM_MERGE ON
$$SM_SIGNAL1 
$$SM_SIGNAL2 
$$SM_MULTI 
$$SM_VAC_MODE HV