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Data from plasma diagnosis (05-2020)/Figure 11 and 13/C2
Experimental diagnosis and modelling of Si/H and Si/C/H plasmas used in the chemical vapour deposition of Si doped thin film diamond -
Data from plasma diagnosis (05-2020)/Figure 12/triplets
Experimental diagnosis and modelling of Si/H and Si/C/H plasmas used in the chemical vapour deposition of Si doped thin film diamond