Data from plasma diagnosis (05-2020)

Experimental diagnosis and modelling of Si/H and Si/C/H plasmas used in the chemical vapour deposition of Si doped thin film diamond

Creator(s) Michael Ashfold, Ed Mahoney
Publication date 01 Jun 2020
Language eng
Publisher University of Bristol
Licence Non-Commercial Government Licence for public sector information
DOI 10.5523/bris.3fb2ydne4072k2rz6uhtyqo1gj
Complete download (zip)
Citation Michael Ashfold, Ed Mahoney (2020): Data from plasma diagnosis (05-2020).
Total size 1.4 GiB


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