Data from plasma diagnosis (05-2020)/Figure 12/triplets
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Data Resources
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0 sccm 10.5 mm.csv
TXT
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0 sccm L5.ovr
XML
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0 sccm L5.pgo
XML
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0 sccm silane flow SiC1.csv
TXT
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1.5 sccm 10.5 mm.csv
TXT
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1.5 sccm L5.ovr
XML
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1.5 sccm L5.pgo
XML
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10 sccm 10.5 mm.csv
TXT
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10 sccm L5.ovr
XML
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10 sccm L5.pgo
XML
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15 sccm 10.5 mm.csv
TXT
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15 sccm L5.ovr
XML
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15 sccm L5.pgo
XML
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20 sccm 10.5 mm.csv
TXT
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20 sccm L5.ovr
XML
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20 sccm L5.pgo
XML
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3 sccm 10.5 mm.csv
TXT
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3 sccm L5.ovr
XML
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3 sccm L5.pgo
XML
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30 sccm 10.5 mm.csv
TXT
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30 sccm L5.ovr
XML
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30 sccm L5.pgo
XML
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40 sccm 10.5 mm.csv
TXT
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40 sccm L5.ovr
XML
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40 sccm L5.pgo
XML
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40 sccm silane flow SiC subtract 0 sccm.csv
TXT
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40 sccm silane flow SiC1.csv
TXT
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5 sccm 10.5 mm.csv
TXT
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5 sccm L5.ovr
XML
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5 sccm L5.pgo
XML
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9 extended.pgo
XML
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residuals of C2 from silane flow - safety.xlsx
XLSX
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residuals of C2 from silane flow.xlsx
XLSX